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Ultrafine Particle Removal for Water Treatment

Ultrapure water, as used in the semiconductor and electronics industry, requires the removal of as many particles as possible, even particles smaller than 0.05 microns. More information is presented below, or you can go to the product selection table at the bottom of this page to explore specific filter options for removal of ultrafine particles.

The schematic shows an ultrapure water system, with possible locations of ultrafine particle removal filters highlighted. In most facilities, filters are located at multiple points in the water system to assure removal of any particles that may pass through other filters. This helps facilities meet the water purity standards for the industry published by SEMI and other organizations.

Ultrafine Particle Removal Schematic
  1. A- Particle Trap Filtration
  2. B- Carbon Fines Trap
  3. C- Resin Trap
  4. D- RO Prefilter
  1. E- Tank Vent Filter
  2. F- Loop Filter
  3. G- Cold UPDI Water POU Filter
  4. H- Hot UPDI Water POU Filter

Measuring Purity

The purity is measured by particle content, water conductivity, total organic carbon (TOC) content and bacteria levels. To reach the required levels of ultra-purity, contaminants including ultrafine particles, colloidal silica, bacteria, total organic carbon (TOC), and metal ions need to be removed. Filters cannot totally remove ions or TOC, but filters can remove colloidal silica, particles, bacteria and pyrogens.

Filters are used multiple locations in the water distribution system to assure that both particles entering the distribution system are removed and particles that may be generated by system components are also removed.

Filters with the smallest pore size ratings are usually what are used in distribution loop filtration as well as for point-of-use (POU) installations. Filters with ratings no larger than 0.1μm and, more often, filters with ratings of 0.03μm are used. Smaller pore size membranes are used in some installations, but the vast majority of those filters are tangential flow devices that require part of the flow of expensive UPDI water to go to drain.

Custom systems are designed for new applications and to solve challenges in existing processes. Critical Process Filtration will work with you to design, build and install a cost-effective system that delivers the results you need. Contact us or visit our custom filtration systems page for more information.

Application Summary

Critical Process Filtration has multiple filter options for removing ultrafine particles in electronics water systems. To read more about how to remove ultrafine particles using filters, click on the link below. Critical Process Filtration has created a short explanation of how filtration can help improve your water quality.

Critical Process Filtration has a variety of hydrophilic membrane filters for water treatment applications. Two options specifically designed for ultrapure water are shown in the table below, with links to additional data.

Product Selection

Filter Media
Filter Grade
Disc Filter
Pore Sizes
Available (µm)
Symmetric Polyethersulfone (PES) Membrane
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0.03. 0.1, 0.22, 0.45, 0.65
Symmetric, hydrophilic PES membrane for high flow rates and broad chemical compatibility.
Nylon 6,6 Membrane
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0.1, 0.22, 0.45, 0.65
Designed for use in DI water applications as well as chemical filtration

Click HERE to request a quote for your application. To estimate the number of filters you will need for your application, use our unique sizing tools.

Additional filter options are also available for special circumstances. Contact Critical Process Filtration for more information.

We can help you solve tough filtration problems. Is your water treatment system becoming fouled by contaminants in incoming water? Contact us for information on how to collect and submit a water sample for a contaminant analysis. We will identify what is in the incoming water and help you find a way to prevent it from fouling your system.

We also have some tools to help you manage the evaluation of various filter options in your system. Click on the link to access to our technical document library and learn more about how Critical Process Filtration products can improve the cost-effectiveness of your system.